Micromechanical sensor

专利名称：Micromechanical sensor发明人：Hanno Hammer申请号：US14464307申请日：20140820

公开号：US20140352433A1公开日：20141204

专利附图：

摘要：A micromechanical sensor comprising a substrate () and at least one mass ()which is situated on the substrate () and which moves relative to the substrate () is usedto detect motions of the sensor due to an acceleration force and/or Coriolis force whichoccur(s). The mass () and the substrate () and/or two masses () which move toward one

another are connected by at least one bending spring device (). The bending springdevice () has a spring bar () and a meander (), provided thereon, having a circle ofcurvature (K K K K K) whose midpoint (MP MP MP MP MP) and radius of curvature (r r r rr) are inside the meander (). For reducing stresses that occur, in addition to the radius ofcurvature (r r r r r) having the inner midpoint (MP MP MP MP MP), the meander () has atleast one further radius of curvature (r r r r r r) having a midpoint (MP MP MP MP MP MP)outside the meander (). The at least one further radius of curvature (r r r r r r) is situatedbetween the meander () and the spring bar ().

申请人：Maxim Integrated Products GMbH

地址：San Jose CA US

国籍：US

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