Differential pressure transducer

专利名称：Differential pressure transducer发明人：Jacobs-Cook, Alan James申请号：EP94305953.5申请日：19940811公开号：EP0649009B1公开日：19981021

摘要：A differential pressure transducer is provided in which first and second

diaphragms (16, 18) are formed within a block of material, such as monocrystalline silicon.Each diaphragm carries a support (20, 22) for a bridge. The supports (20, 22) are offsetfrom the centre of the diaphragms such that deflection of the diaphragms imparts adegree of lateral motion to the respective support. The bridge is held within an

evacuated cavity and the resonant frequency of the bridge is a function of the differencein pressure action of the diaphragms.

申请人：BOOKHAM TECHNOLOGY LTD

地址：GB

国籍：GB

代理机构：Unwin, Stephen Geoffrey

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