Apparatus and method for manufacturing devices on

专利名称：Apparatus and method for manufacturing

devices on a flexible substrate

发明人：Pieterse, Gerben,Giesen, Peter Theodorus

Maria

申请号：EP09173828.6申请日：20091022公开号：EP2315507A1公开日：20110427

专利附图：

摘要：A method for manufacturing devices on a flexible substrate is presented thatcomprises at least one set of the following steps: a) Providing (S1) the flexible substrate

with a first pattern by a first patterning process, b) Transporting (S2) the flexiblesubstrate with the first pattern, c) Forming (S3) a spatial representation of the firstpattern at the transported substrate, d) Transforming (S4) said spatial representationinto a frequency domain representation, e) Determining (S5) at least one of an estimationof a deviation in scale and an estimation of a deviation in orientation relative to a

reference pattern, by comparing said frequency domain representation with a frequencydomain representation of the reference pattern, f) Determining (S6) at least one controlparameter on the basis of said at least one estimation, g) applying (S7) a secondpatterning process to apply a second pattern at the substrate, the second patterningprocess being controlled by said at least one control parameter.

申请人：Nederlandse Organisatie voor Toegepast -NatuurwetenschappelijkOnderzoek TNO

地址：Schoemakerstraat 97 2628 VK Delft NL

国籍：NL

代理机构：Hatzmann, Martin

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