SURFACE INSPECTION DEVICE, SURFACE INSPECTION METH

专利名称：SURFACE INSPECTION DEVICE, SURFACE

INSPECTION METHOD AND PROGRAM

发明人：KOMATSU Takafumi,ABE

Yoshihisa,YAMAGUCHI Wataru,TAKEBEYosuke

申请号：EP15836798.7申请日：20150721公开号：EP3187860A4公开日：20180418

摘要：In order to determine white blurring objectively and without irregularity, thissurface inspection device is provided with an opening, multiple measurement units, anacquisition unit, and a calculation unit. The opening defines an aperture plane used formeasurement purposes. The multiple measurement units each has a light emitting unitand a light receiving unit, and, seen in a perspective planar view from the imaginarynormal line of the aperture plane, are arranged in mutually different directions withrespect to the opening. For each measurement unit, the acquisition unit acquires adetection value relating to brightness, corresponding to the light received through theaperture plane by the light receiving unit after being emitted from a sample surface inresponse to being irradiated by light from the light emitting unit through the apertureplane. The calculation unit calculates an evaluation value relating to the degree ofvariation of the multiple detection values obtained by the acquisition unit for each of themeasurement units. Further, a first angle formed between the first optical path of lighttravelling from the light emitting unit towards the aperture plane and the normal line of

said aperture plane, a second angle formed between said normal line and a secondoptical path of light travelling from the aperture plane towards the light receiving unit,and a third angle formed between the first optical path and the second optical path arethe same in each of the multiple measurement units.

申请人：Konica Minolta, Inc.

地址：2-7-2 Marunouchi Chiyoda-ku Tokyo 100-7015 JP

国籍：JP

代理机构：Henkel, Breuer & Partner

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